Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology

Table 2

Parameters of piezoresistive pressure sensors.

Range(Kpa)	0-100
Span(mV)	70-80
Sensitivity(mV/kPa)	0.7-0.8
Non-Linearity(%FS)	0.02
Pressure hysteresis(%FS)	0.007
Temperature hysteresis(mV)	<0.1
TCO(μV/°C)	≦40
TCS(%FS)	-0.202