Design Approaches of MEMS Microphones for Enhanced Performance

<div>(a) Membranes with different types of springs [<a href="/journals/js/2019/9294528/#B106">106</a>] and (b) a graph representing different types of springs vs mechanical sensitivity, in which springs C and D, which make an X-shaped structure with the membrane, show higher sensitivities as compared to the other membranes with springs A and B [<a href="/journals/js/2019/9294528/#B106">106</a>].</div>

Journal of Sensors

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Figure 12

Figure 12: Design Approaches of MEMS Microphones for Enhanced Performance 