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Journal of Sensors
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2019
/
Article
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Fig 18
/
Review Article
Design Approaches of MEMS Microphones for Enhanced Performance
Figure 18
Top view of a capacitive microphone in which cracks occurred due to MGF testing [
192
] (a) in both the diaphragm and back plate and (b) in the back plate only [
192
].
(a)
(b)