Design Approaches of MEMS Microphones for Enhanced Performance

Figure 22

Second-order directional microphone designs [217] with (a) a coupling spring, (b) mismatch in two FODM designs, (c) omnidirectional response due to the mismatches in two FODM designs, (d) other suggested coupling springs in [217], (e) no mismatches in the two FODM designs (balanced designs), and (f) figure eight-type directional response.

(a)

(b)

(c)

(d)

(e)

(f)