Review Article
Design Approaches of MEMS Microphones for Enhanced Performance
Table 1
Properties of microphones designed by different manufacturers.
| | Company’s name (year) | Diaphragm size | Diaphragm thickness (μm) | Sensing gap (μm) | Sensitivity | SNR |
| | Analog Devices [147] (2006) | NA | NA | 3 | -47 dBV/Pa | NA | | Knowles [151] (2006) | 0.56 mm | 1 | 4 | -22 dBV/Pa | 59 dB | | Bosch [150] (2010) | 0.6 mm | NA | NA | NA | 58 dB | | Infineon [65, 153] (2013, 2017) | 1.1 mm, | 330 nm, NA | 2.2, NA | -78 dBV/Pa, -46 dBFS | 66 dB, 67 dB | | STM [154, 155] (2011, 2017) | 0.73 mm | NA | NA | -26 dBFS, -38 dBV/Pa | 61~65 dB |
|
|
dB full scale for digital microphones. Diameter of the diaphragm. Package size. |
