Review Article
Design Approaches of MEMS Microphones for Enhanced Performance
Table 2
Properties of FET-integrated microphones.
| | Author (year) | Diaphragm size (mm2) | Diaphragm thickness (μm) | Sensing gap (μm) | Drain current (μA) | Drain-to-source voltage (V) | Bias voltage (V) | Sensitivity (mV/Pa) | Noise level (dBA SPL) |
| | Kühnel [19, 26] (1991-92) | 1 | NA | 2 | 2~2.5 mA | 0~9 | 30 | 3 | 62 | | Malcovati et al. [20] (1993) | NA | 5 | 3.5 | 150 | 15 | 15 | 38 | 58 | | Arnau and Soares [21] (1996) | 0.25 | 4.5 | 1.5 | 17 | NA | 9 | 20 μV/Pa | 69 |
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NA: not available.
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