Review Article
Design Approaches of MEMS Microphones for Enhanced Performance
Table 3
Properties of wideband microphones.
| | Author (year) | Microphone type | Diaphragm size | Diaphragm thickness (μm) | Maximum pressure (dB) | Sensitivity | Noise floor | Bandwidth |
| | Kressmann et al. [108] (2002) | Capacitive | 1mm | NA | 123 | 2.9 mV/Pa | 39 dBA | 10 Hz-50 kHz | | Scheeper et al. [179] (2003) | Capacitive | 1.95 mm | 0.5 | 141 | 22 mV/Pa | 23 dBA | 251 Hz-20 kHz | | Hansen et al. [178] (2004) | Capacitive | | NA | NA | 43 dBV/Pa | 64 dBA | 0.1 Hz-100 kHz | | Horowitz et al. [42] (2007) | Piezoelectric | 1.8 mm | 3 | 169 | 1.66 μV/Pa | 48 dB | 100 Hz-50.8 kHz | | Martin et al. [128] (2007) | Capacitive | 0.46 mm | 2.25 | 164 | 390 μV/Pa | 41 dB | 300 Hz-20 kHz | | Williams et al. [40] (2012) | Piezoelectric | 0.82 mm | 2.14 | 172 | 39 μV/Pa | 40 dB | 69 Hz-20 kHz | | Kuntzman and Hall [180] (2014) | Capacitive | 0.63 mm | 2.25 | NA | 159 μV/Pa | 32 dB | 10 kHz-230 kHz | | Sedaghat and Ganji [111] (2018) | Capacitive | 0.25mm2 | 3 | NA | 27.45 fF/Pa | NA | ~22 kHz |
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Side length of a square diaphragm. Radius of a diaphragm. Diameter of a diaphragm. Capacitive sensitivity. Simulated resonant frequency. |
