A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

Figure 17

Signal waveform of the mode-matching control system: (a) feedback calibration signal of pilot tones, (b) preamplifier signal waveforms of the sensitive interface, (c) spectrum of feedback calibration signal without closed-loop force feedback control and quadrature error correction control (before mode matching and after mode matching), and (d) transient response of preamplifier signal waveforms and tuning voltage.

(a)

(b)

(c)

(d)