A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr class="thead"><td class="align_left">Parameter</td><td class="align_center">Value</td></tr><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr><td class="align_left"><span style="width: 9.52083ptpx;"><svg height="10.7866pt" id="M53" style="vertical-align:-2.150701pt" version="1.1" viewbox="-0.0498162 -8.6359 9.52083 10.7866" width="9.52083pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M699 368C699 549 574 666 407 666C186 666 23 488 23 277C23 113 129 -3 288 -13L307 -26C431 -111 501 -139 533 -147C559 -154 613 -163 658 -164L666 -141C597 -111 507 -66 430 -11L416 -1C580 42 699 190 699 368ZM601 371C601 227 518 54 381 22L354 40L278 24C175 47 120 145 120 269C120 451 235 631 398 631C540 631 601 521 601 371Z"></path></g></svg></span></td><td class="align_center">10000</td></tr><tr><td class="align_left"><span style="width: 25.1802ptpx;"><svg height="14.1649pt" id="M54" style="vertical-align:-5.529pt" version="1.1" viewbox="-0.0498162 -8.6359 25.1802 14.1649" width="25.1802pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M743 650H503L496 622L527 618C563 613 564 603 532 573C449 495 371 431 323 392C301 374 272 355 246 346L280 522C297 609 300 614 379 622L385 650H135L129 622C209 614 215 609 198 522L124 133C106 39 99 35 23 28L17 0H271L277 28C193 35 192 39 208 133L239 316C264 328 280 325 303 288C368 183 435 90 502 0H652L659 28C602 34 584 43 543 94C495 154 403 283 347 369L574 554C634 603 659 612 735 624L743 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,9.23,3.132)"><path d="M620 667C620 684 593 710 552 710C515 710 459 687 409 634C360 582 334 506 320 433H247L215 400L220 388H310L259 80C224 -129 199 -161 185 -174C175 -183 160 -192 141 -192C123 -192 90 -181 75 -165C69 -158 64 -156 54 -164C39 -178 24 -195 24 -208C24 -231 61 -257 94 -257C124 -257 162 -243 209 -194C267 -134 303 -66 343 107C369 220 378 279 393 385L503 397L523 433H404C432 619 464 660 500 660C522 660 542 646 566 621C573 614 583 615 593 621C603 628 620 648 620 667Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,15.095,3.132)"><path d="M556 236V289H56V236H556Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,20.655,3.132)"><path d="M398 365C398 411 356 451 297 451C250 451 198 430 151 397C65 336 24 230 24 139C24 14 97 -12 148 -12C198 -12 284 7 373 104L355 130C306 84 246 53 198 53C132 53 111 109 111 163V189C209 211 398 261 398 365ZM317 351C317 308 273 262 117 225C134 338 189 383 221 399C230 404 249 407 263 407C295 407 317 389 317 351Z"></path></g></svg></span></td><td class="align_center">1<i>e</i>7</td></tr><tr><td class="align_left"><span style="width: 15.7447ptpx;"><svg height="14.1649pt" id="M55" style="vertical-align:-5.529pt" version="1.1" viewbox="-0.0498162 -8.6359 15.7447 14.1649" 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660 542 646 566 621C573 614 583 615 593 621C603 628 620 648 620 667Z"></path></g></svg></span></td><td class="align_center">45</td></tr><tr><td class="align_left"><span style="width: 13.6165ptpx;"><svg height="11.927pt" id="M56" style="vertical-align:-3.291101pt" version="1.1" viewbox="-0.0498162 -8.6359 13.6165 11.927" width="13.6165pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M743 650H503L496 622L527 618C563 613 564 603 532 573C449 495 371 431 323 392C301 374 272 355 246 346L280 522C297 609 300 614 379 622L385 650H135L129 622C209 614 215 609 198 522L124 133C106 39 99 35 23 28L17 0H271L277 28C193 35 192 39 208 133L239 316C264 328 280 325 303 288C368 183 435 90 502 0H652L659 28C602 34 584 43 543 94C495 154 403 283 347 369L574 554C634 603 659 612 735 624L743 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,9.23,3.132)"><path d="M387 400C387 425 348 451 303 451C247 451 176 414 132 376C69 322 24 228 24 148C24 43 74 -12 147 -12C211 -12 301 33 363 103L346 128C319 99 249 51 193 51C148 51 112 84 112 165C112 230 130 287 154 330C170 359 199 400 243 400C277 400 304 383 326 354C333 345 343 343 354 348C378 360 387 382 387 400Z"></path></g></svg></span></td><td class="align_center">1</td></tr><tr><td class="align_left"><span style="width: 9.2729ptpx;"><svg height="8.68572pt" id="M57" style="vertical-align:-0.0498209pt" version="1.1" viewbox="-0.0498162 -8.6359 9.2729 8.68572" width="9.2729pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M686 28C612 35 607 44 591 112C563 234 541 360 519 489L489 666L457 658L147 121C100 40 89 36 24 28L17 0H240L250 28C168 34 159 41 190 101L262 237H482C495 180 503 137 510 91C517 47 514 35 441 28L433 0H677L686 28ZM475 280H285L429 541H431L475 280Z"></path></g></svg></span></td><td class="align_center">1</td></tr><tr class="table-tr"><td colspan="2"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Journal of Sensors

tab2

Table 2

Table 2: A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope 