A Wireless Passive Vibration Sensor Based on High-Temperature Ceramic for Harsh Environment

Figure 4

Static characteristics in the -axis direction at different temperatures: (a) deformation distribution of sensitive beam at 100°C; (b) equivalent stress distribution of sensitive beam at 100°C; (c) deformation distribution of sensitive beam at 200°C; (d) equivalent stress distribution of sensitive beam at 200°C; (e) deformation distribution of sensitive beam at 300°C; (f) equivalent stress distribution of sensitive beam at 300°C; (g) deformation distribution of sensitive beam at 400°C; (h) equivalent stress distribution of sensitive beam at 400°C.