Review Article
Research Progress on Humidity-Sensing Properties of Cu-Based Humidity Sensors: A Review
Table 1
Moisture-sensitive properties of copper oxide nanostructures with different morphologies.
| | Morphology | Synthesis method | (°C) | Humidity range | Humidity-sensitive properties | Ref. | | Response time (s) | Recovery time (s) | Hysteresis | Response |
| | Mesoporous particles | Thermal decomposition | 25 | 33-90%RH | ~1 | 11 | NA | NA | [34] | | Nanoparticles | Biosynthesis | 25 | 7-97%RH | 22 | 31 | NA | 99% | [65] | | Microwave-assisted chemical solution | 25 | 25–95%RH | NA | NA | NA | 99% | [71] | | Nanowire | Thermal annealing | 25 | 20-80%RH | ~98 | ~98 | NA | NA | [8] | | Deposition | 25 | 20-90%RH | NA | NA | <1.5% | NA | [3] | | Two-step electrochemical deposition | 25 | 12-97%RH | NA | NA | NA | 130 | [32] | | Nanosheets | Hydrothermal | 25 | 11.3-97.3%RH | 32 | 22 | NA | NA | [70] | | Spin-spray | 25 | 20-90%RH | 2.1 | 2.8 | 4% | 170% | [72] | | Nanorods | Hydrothermal | 25 | 30-85% | NA | NA | NA | 82.03% | [73] | | Nanofilm | SILAR | 25 | 20-80% | 130 | 320 | 5% | NA | [54] |
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Note: : operating temperature; NA: not available. |
