Research Article
Computational and Experimental Analysis of a Triode Microfuse with a WO3 Heater
Figure 13
Four types of device schematics for analyzing low sheet resistance in the tungsten oxide heater. (a) SiO2 substrate-WO3 heater-Au electrode. (b) SiO2 substrate-WO3 heater-Pt doping-Au electrode. (c) SiO2 substrate-Al metal formation-WO3 heater-Au electrode, (d) SiO2 substrate- Al metal formation-WO3 heater-Pt doping-Au electrode.
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