Research Article
Computational and Experimental Analysis of a Triode Microfuse with a WO3 Heater
Figure 14
Four types of device structures are (a) SiO2 substrate-WO3 heater-Au electrode, (b) SiO2 substrate-WO3 heater-Pt doping-Au electrode, (c) SiO2 substrate-Al metal formation-WO3 heater-Au electrode, (d) SiO2 substrate- Al metal formation-WO3 heater-Pt doping-Au electrode, and their schematic, optical images, sheet resistance, and contact type between heater and electrode.