Influence of the Crystal Texture on Raman Spectroscopy of the AlN Films Prepared by Pulse Laser Deposition

Table 2

The fitting parameters of 𝐴₁ (TO) and 𝐸₂ (high) peaks in the Raman spectrum of the AlN films prepared by PLD.

Sample	Laser energy density (J/cm^2)		𝐴1 (TO)			𝐸2 (high)
		Center (cm^−1)	FWHM (cm^−1)	Area (%)	Center (cm^−1)	FWHM (cm^−1)	Area (%)
A	1.3	618.7±0.4	15.5±0.6	31.6±2.1	657.2±1.2	32.1±1.5	65.4±2.1
B	2.4	616.4±0.3	11.7±1.2	22.2±1.1	659.6±0.8	21.5±0.5	71.1±1.1
C	3.5	616.8±0.5	19.7±1.5	2.3±0.2	663.3±0.2	10.1±0.3	97.7±0.2
D	4.8	620.4±0.4	10.6±0.8	10.8±1.8	665.1±0.5	14.3±0.7	89.2±1.3