Compression of Extreme-Ultraviolet Ultrashort Pulses by Grating Configurations

Table 3

Parameters of the compressor for the 70–140 eV spectral region.

Mirrors arms	200 mm
Grating groove density	200 gr/mm
Grating altitude	1°
Grating azimuth	4.8°
Distances S1, S2, and S4	50 mm
S3	378 mm
Total size of the compressor	≈1.4 m