Research Article

A Study of Structural and Photoluminescence for Al-Doped CdO Thin Films

Table 1

The deposition condition of Al-doped CdO thin films.

SampleTime (hr)Temperature (°C)Flow rate
N : O (sccm)
Power (W)

S-1115010 : 10100
S-2215010 : 10100
S-3315010 : 10100
S-4415010 : 10100
S-5125010 : 10100
S-6135010 : 10100
S-7145010 : 10100