Research Article
A Study of Structural and Photoluminescence for Al-Doped CdO Thin Films
Table 1
The deposition condition of Al-doped CdO thin films.
| Sample | Time (hr) | Temperature (°C) | Flow rate N : O (sccm) | Power (W) |
| S-1 | 1 | 150 | 10 : 10 | 100 | S-2 | 2 | 150 | 10 : 10 | 100 | S-3 | 3 | 150 | 10 : 10 | 100 | S-4 | 4 | 150 | 10 : 10 | 100 | S-5 | 1 | 250 | 10 : 10 | 100 | S-6 | 1 | 350 | 10 : 10 | 100 | S-7 | 1 | 450 | 10 : 10 | 100 |
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