Raman Spectroscopic Study of As-Deposited and Exfoliated Defected Graphene Grown on (001) Si Substrates by CVD

Figure 1

Optical microscopy image of the surface morphology of (a) as-deposited graphene and graphene-related phases on diamond-like carbon (DLC) and amorphous carbon (αC) interlayers. The arrows remarked [100] and [010] directions of the Si substrate. The marker represents 20 μm. (b) The exfoliated and transferred graphene flakes on 320 nm SiO₂. The Raman spectra are taken from “+”-marked positions. The marker represents 30 μm. (c) The layers remaining on the surface of the substrate after exfoliation by Scotch tape. The Raman spectra are taken from the “+”-marked positions near points 1, 2, and 3. The marker represents 30 μm. (d) The exfoliated and transferred graphene flakes on glass substrate. The Raman spectra are taken from the “+”-marked positions near points 1 and 2. The marker represents 20 μm. (e) A graphene flake on air bubble near the epoxy resin surface. The Raman spectra are taken from the square-marked position. The marker represents 20 μm.

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