Characterization and Analysis of Ultrathin CIGS Films and Solar Cells Deposited by 3-Stage Process

Table 2

Thickness, average composition, and average band gap for the CIGS films as obtained by XRF and RTSE measurements.

Thickness (μm)	Cu (at %)	In (at %)	Ga (at %)	Cu/(In + Ga) ()	Ga/(In + Ga) ()	Average from XRF (eV)	Average from RTSE (eV)
1.95	23.4	20.7	6.3	0.87	0.23	1.12	1.12
1.55	22.4	20.8	6.9	0.81	0.25	1.13	1.13
1.25	22.7	20.1	6.3	0.86	0.24	1.13	1.12
0.75	21.8	21.0	6.3	0.80	0.23	1.12	1.13
0.55	21.0	19.8	6.2	0.81	0.24	1.13	1.13