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Journal of Spectroscopy
Volume 2019, Article ID 7491671, 6 pages
https://doi.org/10.1155/2019/7491671
Research Article

Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals

1Department of Nuclear Engineering and Management, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan
2Nuclear Professional School, University of Tokyo, 2-22 Shirane, Shirakata, Tokai, Naka, Ibaraki 319-1188, Japan

Correspondence should be addressed to Daisuke Ishikawa; pj.ca.oykot-u.t.q.namyl@awakihsi

Received 12 February 2019; Revised 25 March 2019; Accepted 1 April 2019; Published 17 April 2019

Academic Editor: Nikša Krstulović

Copyright © 2019 Daisuke Ishikawa and Shuichi Hasegawa. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Daisuke Ishikawa and Shuichi Hasegawa, “Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals,” Journal of Spectroscopy, vol. 2019, Article ID 7491671, 6 pages, 2019. https://doi.org/10.1155/2019/7491671.