140976.fig.0020a
(a)
140976.fig.0020b
(b)
Figure 20: Capacity and 𝑄 value of an optimized BaTiO3 thin film capacitor with Pt electrodes on CoorsTec microwave ceramic substrate in dependence on temperature and DC bias voltage (1 kHz). The relative tunability of capacity is shown in Figure 21. The 𝑄 value is maximum for 6 V DC bias.