Oxide Thin Film Heterostructures on Large Area, with Flexible Doping, Low Dislocation Density, and Abrupt Interfaces: Grown by Pulsed Laser Deposition
Figure 20
Capacity and value of an optimized BaTiO3 thin film capacitor with Pt electrodes on CoorsTec microwave ceramic substrate in dependence on temperature and DC bias voltage (1 kHz). The relative tunability of capacity is shown in Figure 21. The value is maximum for 6 V DC bias.