Numerical Simulation and Validation of Multiscale 3D Laser Spiral Machining of Microholes

<table class="table-group" id="tab4"><tr><td><table class="table"><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr class="thead"><td class="align_left">Parameter</td><td class="align_center">Value</td></tr><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr><td class="align_left">Pulse width</td><td class="align_center">250 fs</td></tr><tr><td class="align_left">Repetition frequency</td><td class="align_center">10 kHz</td></tr><tr><td class="align_left">Rotational angular velocity</td><td class="align_center">3000 rpm</td></tr><tr><td class="align_left">Spot diameter</td><td class="align_center">15 <i>µ</i>m</td></tr><tr><td class="align_left">Number of spot trajectory turns</td><td class="align_center">10</td></tr><tr><td class="align_left">Maximum spot trajectory radius</td><td class="align_center">100 <i>µ</i>m</td></tr><tr class="table-tr"><td colspan="2"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Femtosecond-laser spiral machining process parameters.</div>

Laser and Particle Beams

tab4

Table 4

Table 4: Numerical Simulation and Validation of Multiscale 3D Laser Spiral Machining of Microholes 