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Mathematical Problems in Engineering
Volume 2010 (2010), Article ID 407561, 32 pages
Research Article

Model of PE-CVD Apparatus: Verification and Simulations

1Department of Mathematics, Humboldt-University of Berlin, Unter den Linden 6, 10099 Berlin, Germany
2Department of Physics, University of Duisburg-Essen, Lotharstr.1, 47048 Duisburg, Germany

Received 4 January 2010; Accepted 21 April 2010

Academic Editor: Shi Jian Liao

Copyright © 2010 J. Geiser et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

J. Geiser, V. Buck, and M. Arab, “Model of PE-CVD Apparatus: Verification and Simulations,” Mathematical Problems in Engineering, vol. 2010, Article ID 407561, 32 pages, 2010. doi:10.1155/2010/407561