Model of PE-CVD Apparatus: Verification and Simulations

Table 1

Test	$P_R$ [mbar]	${\vartheta }_S$ [C]	$P_{\text{Plasma}}$ [W]	$\varphi$(TMS) [SCCM]	$\varphi$(${\text{H}}_2$) [SCCM]	Ratio [C:Si]	Mass (growth) [g]	Time [min]
080701-01-VA	9.7$E$-2	400	900	10.23	0	0.97811	0.00012	120
080718-01-VA	1.1$E$-1	400	900	10.00	0	1.00174	0.00050	130
080718-02-VA	4.5$E$-2	400	900	10.00	0	1.24811	0.00070	110
080618-01-VA	4.3$E$-2	400	500	10.23	0	1.32078		127
080716-01-VA	1.1$E$-1	400	500	10.00	0	1.42544	0.00250	120
080715-02-VA	1.1$E$-1	400	100	10.00	0	1.58872	0.00337	122
080804-01-VA	4.5$E$-2	400	100	10.00	0	2.91545	0.00356	129
080630-01-VA	9.9$E$-2	800	900	10.23	0	1.09116	0.00102	120
080807-01-VA	4.5$E$-2	800	900	10.00	0	1.18078	0.00118	120
080625-01-VA	3.9$E$-2	800	500	10.23	0	1.06373		120
080626-01-VA	9.3$E$-2	800	500	10.23	0	1.12818	0.00174	130
080806-01-VA	4.8$E$-2	800	100	10.00	0	1.73913	0.00219	121
080715-01-VA	1.1$E$-1	800	100	10.00	0	1.62467	0.00234	120
081016-01-VA	1.0$E$-1	600	300	10.00	0	1.72898	0.00321	123
081020-01-VA	1.1$E$-1	600	300	10.00	50	1.49075	0.00249	114
081028-01-VA	1.1$E$-1	600	300	10.00	15	1.53549	0.00273	120
081023-01-VA	1.1$E$-1	600	300	10.00	10	1.54278	0.00312	127
081027-01-VA	1.1$E$-1	600	300	10.00	5.5	1.55818	0.00277	126
081024-01-VA	1.1$E$-1	600	300	10.00	3.5	1.64367	0.00299	120
081022-01-VA	1.0$E$-1	600	300	10.00	2.5	1.69589	0.00318	127