Model of PE-CVD Apparatus: Verification and Simulations

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr class="thead"><td align="left">  Temperature</td><td align="center"> Ratio (SiC:C)</td></tr><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr><td align="left"> 400</td><td align="center"> 2.4: 1</td></tr><tr><td align="left"> 600</td><td align="center"> 1.5: 1</td></tr><tr><td align="left"> 700</td><td align="center"> 1.211: 1</td></tr><tr><td align="left"> 800</td><td align="center"> 1.1: 1</td></tr><tr class="table-tr"><td colspan="2"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Mathematical Problems in Engineering

tab2

Table 2

Table 2: Model of PE-CVD Apparatus: Verification and Simulations 