Model of PE-CVD Apparatus: Verification and Simulations

Table 23

Parameters of source concentration.

81 point sources at position	$X=\mathrm{10,11,12,000,90};Y=20.$
Starting point of source concentration	$t_{\text{start}}=0.0$
End point of source concentration	$t_{\text{end}}=1·10^8$
Amount of permanent source concentration	$c_{\text{source}}=1.0$
Number of time steps	$100$