Model of PE-CVD Apparatus: Verification and Simulations

Table 25

Parameters of source concentration.

Line source at position	$x\in [\mathrm{5,95}],y\in [\mathrm{20,25}]$
Starting point of source concentration	$t_{\text{start}}=0.0$
End point of source concentration	$t_{\text{end}}=1·10^8$
Amount of permanent source concentration	$c_{\text{source}}=1.0$
Number of time steps	$25$