Model of PE-CVD Apparatus: Verification and Simulations

Table 27

Parameters of source concentration.

$\mathrm{\hspace{0.17em}\hspace{0.17em}}\mathrm{\hspace{0.17em}\hspace{0.17em}}T\mathrm{\hspace{0.17em}\hspace{0.17em}}$	$\mathrm{\hspace{0.17em}\hspace{0.17em}}P\mathrm{\hspace{0.17em}\hspace{0.17em}}$	Exact $\lambda$	Regression $\lambda$	Exact ratio (SiC:C)	Regression ratio (SiC:C)
400	900	1$e$-09	1.703$e$-09	1:0.97	0.835
400	500	0.2$e$-08	2.903$e$-09	1.3:1	1.616
400	100	0.5$e$-08	4.103$e$-09	2.4:1	2.011
600	300	0.25$e$-08	3.303$e$-09	1.5:1	1.774
800	500	0.125$e$-8	2.503$e$-09	1:1	1.192
800	900	0.175$e$-8	1.303$e$-09	1.2:1	1.132
500	500		2.803$e$-09		1.58
600	600		2.4030$e$-09		1.433
800	800		1.603$e$-09		1.206
400	400		3.203$e$-09		1.715
450	450		2.703$e$-09		1.57
800	100		3.703$e$-09		1.93