Model of PE-CVD Apparatus: Verification and Simulations

Table 28

Parameters of source concentration.

Point source of $\text{SiC}$ at position	$(x,y)=(\mathrm{50,20})$
Point source of $\text{H}$ at position	$(x,y)=(\mathrm{50,20})$
Starting point of source concentration	$t_{\text{start}}=0.0$
End point of source concentration	$t_{\text{end}}=1·10^8$
Amount of permanent source concentration	$c_{\text{source}}=1.0$
Number of time steps	$100$