Model of PE-CVD Apparatus: Verification and Simulations

<table class="table-group" id="tab3"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td align="left">  Temperature [C]</td><td align="center"> Power [W]</td><td align="center"> Ratio (SiC:C)</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td align="left"> 400</td><td align="center"> 900</td><td align="center"> 1: 0.97</td></tr><tr><td align="left"> 400</td><td align="center"> 500</td><td align="center"> 1.3: 1</td></tr><tr><td align="left"> 800</td><td align="center"> 900</td><td align="center"> 1.18: 1</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Mathematical Problems in Engineering

tab3

Table 3

Table 3: Model of PE-CVD Apparatus: Verification and Simulations 