Model of PE-CVD Apparatus: Verification and Simulations

Table 30

Parameters of source concentration.

Nine point sources of $\text{SiC}$ at position	$(x=\mathrm{10,20,30,40,50,60,70,80,90};y=20)$
Nine point sources of $\text{SiC}$ at position	$(x=\mathrm{10,20,30,40,50,60,70,80,90};y=20)$
Starting point of source concentration	$t_{\text{start}}=0.0$
End point of source concentration	$t_{\text{end}}=1·10^8$
Amount of permanent source concentration	$c_{\text{source}}=1.0$
Number of time steps	$25$