Model of PE-CVD Apparatus: Verification and Simulations

Table 5

Model-Parameters.

Density	$\rho =1.0$
Mobile porosity	$\varphi =0.333$
Immobile porosity	$0.333$
Diffusion	$D=0.0$
Longitudinal dispersion	${\alpha }_L=0.0$
Transversal dispersion	${\alpha }_T=0.00$
Retardation factor	$R=10.0e-4$ (Henry rate).
Velocity field	$\mathbf{v}\mathrm{\hspace{0.17em}\hspace{0.17em}}=(0.0,-4.0·10^{-8}{)}^t.$
Decay rate of species of 1st EX	${\lambda }_{AB}=1·10^{-68}$.
Decay rate of species of 2nd EX	${\lambda }_{AB}=2·10^{-8}\text{,}$${\lambda }_{BNN}=1·10^{-68}$.
Decay rate of species of 3rd EX	${\lambda }_{AB}=0.25·10^{-8}\text{,}$${\lambda }_{\text{C}B}=0.5·10^{-8}$.
Geometry (2d domain)	$\mathrm{\Omega }=[\mathrm{0,100}]\times [\mathrm{0,100}]$.
Boundary	Neumann boundary at top, left and right boundaries.; Outflow boundary at bottom boundary