Model of PE-CVD Apparatus: Verification and Simulations

Table 7

Spatial discretization parameters.

Initial time step	$\mathrm{\Delta }{t}_{\text{init}}=5·10^7$
Controlled time step	$\mathrm{\Delta }{t}_{\max \hspace{0.17em}}=1.298·10^7,\mathrm{\Delta }{t}_{\min \hspace{0.17em}}=1.158·10^7$
Number of time steps	$\mathrm{100,80,30,25}$
Time step control	Time steps are controlled with the Courant-Number $\text{CF}{\text{L}}_{\max \hspace{0.17em}}=1$