Model of PE-CVD Apparatus: Verification and Simulations

Table 9

Computed and experimental fitted parameters from UG simulations.

$T$	$\lambda$ (fitted)	$\lambda$ (interpolated)	Ratio(SiC:C) (computed with UG)
400	$1/2·10^{-8}$		2.4: 1
500		$0.35·10^{-8}$	1.85: 1
600	$1/4·10^{-8}$		1.5: 1
700		$0.171·10^{-8}$	1.211: 1
800	$1/8·10^{-8}$		1.1: 1