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Mathematical Problems in Engineering
Volume 2010, Article ID 586718, 25 pages
Research Article

A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

1School of Mechanical Engineering, Southeast University, Jiangning, Nanjing 211189, China
2College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210003, China

Received 29 March 2009; Revised 17 September 2009; Accepted 27 October 2009

Academic Editor: Stefano Lenci

Copyright © 2010 Pu Li and Yuming Fang. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


This paper presents a new wavelet interpolation Galerkin method for the numerical simulation of MEMS devices under the effect of squeeze film damping. Both trial and weight functions are a class of interpolating functions generated by autocorrelation of the usual compactly supported Daubechies scaling functions. To the best of our knowledge, this is the first time that wavelets have been used as basis functions for solving the PDEs of MEMS devices. As opposed to the previous wavelet-based methods that are all limited in one energy domain, the MEMS devices in the paper involve two coupled energy domains. Two typical electrically actuated micro devices with squeeze film damping effect are examined respectively to illustrate the new wavelet interpolation Galerkin method. Simulation results show that the results of the wavelet interpolation Galerkin method match the experimental data better than that of the finite difference method by about 10%.