A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="586718.fig.005a" src="https://static.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.005a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Mirror 1 (<math id="M328" xmlns="http://www.w3.org/1998/Math/MathML"><mrow><msub><mrow><mi>g</mi></mrow><mrow><mn>0</mn></mrow></msub></mrow></math>= 28 <math id="M329" xmlns="http://www.w3.org/1998/Math/MathML"><mrow><mi>μ</mi></mrow></math>m)</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="586718.fig.005b" src="https://static.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.005b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Mirror 2 (<math id="M330" xmlns="http://www.w3.org/1998/Math/MathML"><mrow><msub><mrow><mi>g</mi></mrow><mrow><mn>0</mn></mrow></msub></mrow></math>= 13 <math id="M331" xmlns="http://www.w3.org/1998/Math/MathML"><mrow><mi>μ</mi></mrow></math>m)</td></tr></table></td></tr></table>

<table>Comparison of the quality factors obtained by the wavelet Galerkin method, the Pan model and the experimental data of Minikes et al. [<a href="/journals/mpe/2010/586718/#B27">27</a>].</table>

Mathematical Problems in Engineering

fig5

Figure 5

Figure 5: A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping 