A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

Table 1

The parameters of the accelerometer presented by Veijola et al. [26].

Parameters	Values
Mass $m_{\text{plate}}$	4.9$\mathrm{\hspace{0.17em}\hspace{0.17em}}\times \mathrm{\hspace{0.17em}\hspace{0.17em}}$10^-6 kg
Spring constant$\mathrm{\hspace{0.17em}\hspace{0.17em}}{k}_{\text{spring}}$	212.1 N/m
Gap spacing $g_0$	3.95 $\mu$m
Length of the moving masss $l_x$	2 960 $\mu$m
Width of the moving masss $l_y$	1 780 $\mu$m
Ambient pressure $p_0$	11 Pa
Bias voltage$\mathrm{\hspace{0.17em}\hspace{0.17em}}{V}_0$	9 V
Effective viscosity ${\eta }_{\text{eff}}$	10.2$\mathrm{\hspace{0.17em}\hspace{0.17em}}\times \mathrm{\hspace{0.17em}\hspace{0.17em}}$10^-9 N$·$s$·$m^-2