A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

Table 2

A Comparison of the damping ratios obtained by different methods with the experimental data [26].

Methods	Damping ratio	Peak value (dB)
Experimental data [26]	0.0239	18.3
Blech’s model (error)	0.0159 (33.5%)	21.7
The wavelet interpolation Galerkin method (error)	0.0155 (35.1%)	21.9
The finite difference method (error)	0.0136 (43.1%)	23.2