Research Article
A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping
Table 4
A comparison of quality factors obtained by Pan’s model, the wavelet interpolation Galerkin method and the finite difference method for mirror 1.
| (torr) | Pan’s model | The wavelet interpolation Galerkin method (error) | The finite difference method (error) |
| 0.08 | 5.784104 | 5.987 104 (3.5%) | 6.586 × 104 (13.9%) | 0.10 | 4.483104 | 4.627 104 (3.2%) | 5.160 × 104 (15.1%) | 0.50 | 7.070103 | 7.330 103 (3.7%) | 8.006 × 103 (13.2%) | 1 | 3.306103 | 3.388 × 103 (2.5%) | 3.694 × 103 (11.7%) | 3 | 1.061103 | 1.080 × 103 (1.8%) | 1.173 × 103 (10.6%) | 6 | 5.680102 | 5.895 × 102 (3.8%) | 6.526 × 102 (14.9%) | 10 | 3.979102 | 4.052 × 102 (1.8%) | 4.454 × 102 (11.9%) | 30 | 2.451102 | 2.505 × 102 (2.2%) | 2.721 × 102 (11.0%) | 60 | 2.074 × 102 | 2.160 × 102 (4.1%) | 2.327 × 102 (12.2%) | 100 | 1.994 × 102 | 2.035 × 102 (2.1%) | 2.240 × 102 (12.3%) | 760 | 1.850 × 102 | 1.896 × 102 (2.5%) | 2.109 × 102 (14.0%) |
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