A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

Table 6

A comparison of quality factors between $p_0$ = 10 and 760 torr for mirror 1.

$p_0^{}$ (torr)	Experiment data [27]	Pan’s model (error)	The wavelet interpolation Galerkin method (error)	The finite difference method (error)
10	345	398 (15.4%)	405 (17.4%)	445 (29.0%)
20	275	289 (5.1%)	301 (9.4%)	311 (13.1%)
40	229	236 (3.1%)	241 (5.2%)	252 (10.0%)
760	179	185 (3.4%)	190 (6.1%)	211 (17.9%)