A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

Table 7

A comparison of quality factors between $p_0$ = 10 and 760 torr for mirror 2.

$p_0^{}\mathrm{\hspace{0.17em}\hspace{0.17em}}$(torr)	Expertiment data [27]	Pan’s model (error)	The wavelet interpolation Galerkin method (error)	The finite difference method (error)
10	66	80.0 (21.2%)	81.2 (23.0%)	90.9 (37.7%)
20	40	48.8 (22.0%)	50.1 (25.3%)	54.0 (35.0%)
40	27	30.1 (11.5%)	31.0 (14.8%)	33.5 (24.1%)
760	18	18.2 (1.1%)	19.0 (5.6%)	20.6 (14.4%)