The Effects of Structure Defects on the Performance of a Micro Comb Resonator

Table 1

The structural parameters of microcomb resonator.

Parameter	Size
Finger gap: $g$/$\mu$m	2.88
Finger length: $l$/$\mu$m	40.05
Finger width: $w$/$\mu$m	2
Gap of comb: $c$/$\mu$m	20.61
Beam length: $b_l$/$\mu$m	151
Beam width: $b_w$/$\mu$m	1.1
Thickness: $h$/$\mu$m	1.96
Area of the lower surface of the movable Finger structure: $A$/$\mu$m^2	$5.1\times {10}^3$
Sum of the fingers’ side face area: $A_c$/$\mu$m^2	$2.35\times {10}^3$
Substrate gap: $d$/$\mu$m	2
Truss length: $t_l$/$\mu$m	78
Truss width: $t_w$/$\mu$m	13