A Selection Approach for Optimized Problem-Solving Process by Grey Relational Utility Model and Multicriteria Decision Analysis

Table 3

The experimental results of abnormal situation of wafer cleaning step.

Method	Item
	Candidate actions	Precision	Recall
The method in [4]	32	62.8% (86/137)	75.4% (86/114)
This paper’s method	26	68.3% (86/126)	83.5% (86/103)