Vision Servo Motion Control and Error Analysis of a Coplanar Stage for Image Alignment Motion
Figure 11
The positioning repeatability of -axial motion of stage: (a) starting point; (b) end point; (c) position of -axis when is at starting point; (d) position of -axis when is at end point; (e) position of -axis when is at starting point; (f) position of -axis when is at end point.
