Vision Servo Motion Control and Error Analysis of a Coplanar <svg     style="vertical-align:-0.0pt;width:50.849998px;" id="M1" height="14.7" version="1.1" viewBox="0 0 50.849998 14.7" width="50.849998"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg">
	
		
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</svg> Stage for Image Alignment Motion

<table>Optical alignment system structure.</table>

Mathematical Problems in Engineering

fig16

Figure 16

Figure 16: Vision Servo Motion Control and Error Analysis of a Coplanar <svg     style="vertical-align:-0.0pt;width:50.849998px;" id="M1" height="14.7" version="1.1" viewBox="0 0 50.849998 14.7" width="50.849998"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg">
	
		
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</svg> Stage for Image Alignment Motion 

Mathematical Problems in Engineering

Vision Servo Motion Control and Error Analysis of a Coplanar Stage for Image Alignment Motion

Figure 16