Vision Servo Motion Control and Error Analysis of a Coplanar 𝑋𝑋𝑌 Stage for Image Alignment Motion

Figure 18

Experimental result 2 of positioning repeatability of image alignment (4,000 times of alignment) (a) 𝑋-direction; (b) 𝑌-direction; (c) 𝜃-direction.

(a)

(b)

(c)