Mathematical Problems in Engineering

Research Article

Vision Servo Motion Control and Error Analysis of a Coplanar Stage for Image Alignment Motion

Figure 5

Positioning error estimation results: (a) ; (b) ; (c) ; (d) ; (e) ; (f) .
592312.fig.005a
(a)
592312.fig.005b
(b)
592312.fig.005c
(c)
592312.fig.005d
(d)
592312.fig.005e
(e)
592312.fig.005f
(f)