Research Article

Vision Servo Motion Control and Error Analysis of a Coplanar Stage for Image Alignment Motion

Table 1

Estimated glass position error when the camera setup error is existed. (unit: mm, degrees).

Estimated error

±1000
±1 0.017±0.013 0.013
±1000
±1000
±1000
±1 2.608±1.973±2.020
±1
±100
±1 0.018 0.013±0.014
±1000
±1000
±1000
±10 0.02 0.02
±1
±10±0.0350
±1000
±1000
±1000
±1000
±10 0.0290