Journals
Publish with us
Publishing partnerships
About us
Blog
Mathematical Problems in Engineering
Journal overview
For authors
For reviewers
For editors
Table of Contents
Special Issues
Mathematical Problems in Engineering
/
2013
/
Article
/
Tab 1
/
Research Article
Vision Servo Motion Control and Error Analysis of a Coplanar
Stage for Image Alignment Motion
Table 1
Estimated glass position error when the camera setup error is existed. (unit: mm, degrees).
Estimated error
±1
0
0
0
±1
0.017
±0.013
0.013
±1
0
0
0
±1
0
0
0
±1
0
0
0
±1
2.608
±1.973
±2.020
±1
±1
0
0
0°
±1
0.018
0.013
±0.014
±1
0
0
0
±1
0
0
0
±1
0
0
0
±1
0
0.02
0.02
±1
±1
0
±0.035
0
±1
0
0
0
±1
0
0
0
±1
0
0
0
±1
0
0
0
±1
0
0.029
0