Vision Servo Motion Control and Error Analysis of a Coplanar 𝑋𝑋𝑌 Stage for Image Alignment Motion

Table 2

Result of floating reference point movement centered on CCD1 sample center.

Rotation angle (degree)	Center position (𝜇m)
	x	y
−0.5	−326.7	113.7
−0.45	−326.0	116.0
−0.4	−326.7	113.7
−0.35	−326.7	114.4
−0.3	−325.2	119.2
−0.25	−323.3	123.9
−0.2	−322.9	130.2
−0.15	−323.7	130.2
−0.1	−322.9	128.6
−0.05	−321.4	124.7
0	−319.8	127.9
0	0	0
0.05	1.5	0.8
0.1	1.5	1.6
0.15	2.3	3.9
0.2	3.8	2.4
0.25	5.4	2.4
0.3	6.1	6.3
0.35	6.9	4.7
0.4	7.7	7.9
0.45	9.2	14.2
0.5	10.7	17.4