Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability

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</svg> Volt, with considering the effect of temperature and for various temperature conditions at the switch tip.</table>

Mathematical Problems in Engineering

fig6

Figure 6

Figure 6: Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability 