Fuzzy PID Feedback Control of Piezoelectric Actuator with Feedforward Compensation

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr class="thead"><td align="left" rowspan="2">Controller</td><td align="center" colspan="3">Step response </td><td align="center">Sinusoidal response</td></tr><tr class="thead"><td align="center">Maximum overshoot (%)</td><td align="center">5% settling time (ms)</td><td align="center">Steady-state error (um)</td><td align="center">Steady-state error bound (um)</td></tr><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td align="left">PID control with <br/>feedforward compensation</td><td align="center">18</td><td align="center">18</td><td align="center">0</td><td align="center">±0.8 × 10<sup>−3</sup></td></tr><tr><td align="left">Fuzzy control with <br/>feedforward compensation</td><td align="center">0</td><td align="center">13</td><td align="center">0</td><td align="center">±0.1</td></tr><tr><td align="left">Fuzzy  PID control with <br/>feedforward compensation</td><td align="center">6</td><td align="center">8</td><td align="center">0</td><td align="center">0</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Comparison of the simulation results of the three controllers.

Mathematical Problems in Engineering

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Table 2

Table 2: Fuzzy PID Feedback Control of Piezoelectric Actuator with Feedforward Compensation 